Detections: H2O
Gas Type: UHP • IND • CR • SP
The state-of-art trace moisture analyzer for high purity bulk and specialty gases used in semiconductor manufacturing and other high-purity applications.
Available Background Gases
N2 • He • Ar • H2 • O2 • CDA • CO • CO2 • GeH4 (mix) • COS • Ne • Kr • Xe • Cl2 • HCl • HBr • SF6 • NF3 • CxFy
Features and Benefits
- Part-per-trillion detection limits
- Calibration-free with zero drift
- Fast speed of response
- Large selection of gas matrices
- No consumables or maintenance
Applications
- UHP Gas quality control
- Semiconductor bulk gas
- Industrial gas QC
- High-Purity CO2
- Etch and cleaning gases
- Fluorinated gases
Communication Interfaces
Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)
Options & Accessories
- Serani Max interface software
- Speed+ performance upgrade
- Corrosion-resistant model
- Environmental enclosure
