• Posas GmbH
    Posas GmbH

CI Semi, a division of CI Systems LTD, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets. Active in the semiconductor process equipment market since 1992, CI offers non contact wafer temperature monitors and wet process concentration monitors to OEMs and to end users.

CI Semi's family of noncontact temperature monitors (the NTM line), incorporate real-time, same point emissivity measurement and compensation making them the ideal solution for in situ process monitoring. CI’s family of wet process analyzers (WetSpec line)  includes a range of monitors -  from conductivity and NDIR solutions for concentration measurement in simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.


Wet Process Concentration Monitoring/Analyzers

Wafer Temperature Monitoring Solutions

video ci wet process video wafer temperature



NTM Delta

Advanced In-situ Emissivity Independent Non-contact Temperature Monitor

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ci ntm delta


Advanced Non-Contact Low Temperature Monitor

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ci ntm w


Wet Process Concentration Analyzer - Multi Channel

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ci wetspec200


Wet Process Concentration Analyzer - Single Channel

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ci wetspec201


Wet Process Monitoring System

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