halo lp

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Detections: H2O

Gas Type: UHP • SP

The HALO LP is designed for the detection of trace moisture in hydrides, such as ammonia, phosphine and arsine, which are used in the production of LEDs and semiconductor devices.

Available Background Gases

N2 • He • Ar • H2 • NH3 • PH3 • AsH3 • NO

Features and Benefits

  • Part-per-billion detection limits
  • Calibration-free with zero drift
  • Fast speed of response
  • No consumables or maintenance
  • Low-pressure operation for interference-free detection


  • High-brightness LED production
  • Semiconductor specialty gas
  • UHP ammonia QC

Communication Interfaces

Ethernet, USB, RS-232, RS-485, 4-20mA analog, Modbus TCP (optional)

Options & Accessories

  • Serani Max interface software
  • Speed+ performance upgrade
  • Environmental enclosure
  • Requires vacuum pump

Select Specifications

halo lp tabelle