The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.
The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS serial interface, or various discrete digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output.
Features
- RS-232 MODBUS remote support
- Control up to 2 Ozone Generators
- Interface with up to 2 Model 452 & Model 470 Ozone Sensors
- Control up to 4 Mass Flow Controllers
- Control up to 2 Backpressure Controllers
- Control up to 2 EV Valves
- Control a water chiller
- System Interlock Inputs
- Remote system-level controls and status I/O
Specifications
| Display | 2 lines x 40 character, alphanumeric, vacuum fluorescent |
| Resolution | 0.01% w/w |
| Cycle Time | Continuous measurement, refreshed every 2 sec or 0.5 Hz |
| Digital I/O | RS-232 C, bi-directional |
| Device I/O Generator Support MFC Control Backpressure Controller Ozone Generator EV Valve Chiller | Designed to support 2 Ozone Generators, industry standard pinout 4 - DB-9 Connectors for 4 MFCs 2 - DB-15 Connectors for 2 Electronic Backpressure regulators 2 - 10 pin IDC header for 2 Ozone Generators 2 - 2 Pin Connectors - 24 VDC 1 - DB-15 Connector for chiller |
| Customer System I/O Interlocks Serial Digital | 1 - System Hardware Interlock 1 - Communications Interlock (user configurable) 1 - Software Interlock (Backpressure) RE-232, DB-25 (Modbus standard - other options available) |
| AC Power | 90 to 240VAC, 50/60 Hz |
| Typical Power Consumption | Less than 225 W |
| Dimensions (WxHxD) | 19.0" x 7.0" x 9.0" (48.0 cm x 17.8 cm x 22.86 cm) |
| Weight | 10.9 lbs. (4.94 kg) |
| Environmental | Designed for indoor use only |
| Operating Temperature | 5 - 35°C |
| Relative Humidity | 80%, non-condensing |
| Compliance | CE |
| Warranty | 1 year |
Specifications subject to change without notice.
All specifications are based on constant conditions.
Applications
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
- Oxide growth
- Surface conditioning
- Ashing
- Particle Cleaning
- Photoresist Removal
- Others