The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

 

All OPTI-Sense sensors are configured with analog and digital interfaces, making them easy to integrate into any process. Configurations are available for the measurement of single and dual gas species.