The 3 in 1 Solution for AMC Monitoring
When product performance or yield loss is discovered at your final test stage, finding portential sources of defects as soon as possible is crucial to maintaining profitability. In many cases, the defects are caused by airborne molecular contaiminants (AMC), which The International Technology Roadmap for Semiconductors (ITRS) now highlights as a key technical challenge in achieving and sustaining low defect rates on devices.
Based on Tiger Optics’ new multi-spectral platform, the T-I Max X3 monitors for HF, NH3 and HCl Airborne Molecular Contaminants (AMCs) continuous and simultaneously in real-time in a more compact design.
BENEFITS
- Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
- Dramatically improved speed of response
- Parts-per-trillion detection limits
- Drift-free, with calibration traceable to the world’s leading reference labs
- No consumables + no calibration gases = Low COO
- Resistant to contamination by particles or VOCs
Specifications
Performance in Cleanroom Air | Range | LDL (3σ100s) | Accuracy at zero | Speed of Response (T10/90 + T90/10) |
| TI-Max HF | 0 - 1 ppm | 40 ppt | +/- 40 ppt | < 3 minutes @ 20 ppb |
| TI-Max HCL | 0 - 4 ppm | 100 ppt | +/- 200 ppt | < 3 minutes @ 20 ppb |
| TI-Max NH3 | 0 - 40 ppm | 300 ppt | +/- 300 ppt | < 3 minutes @ 20 ppb |
Performance | |
| Precision (1σ100s, greater of) | +/- 0,75% or 1/3 of LDL |
| Accuracy at span | +/-4% of reading |
| Environmental conditions | 10°C to 40°C 10% to 90% RH (non-condensing) |
| Sample conditions | 30% to 70% RH at 20°C, 20% to 50% RH at 25°C, 15% to 40% RH at 30°C |
| Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions* | |
| Wetted materials: | Optimized for ppt-level AMCs and fast speed of response |
| Gas connections: | 1/4” PFA Swagelok® inlet & outlet |
| Inlet pressure: | Atmospheric pressure Contact us for details about operating the analyzer at elevated inlet pressure. |
| Outlet pressure: | Vacuum (<10 Torr) |
| Flow rate: | ~3 slpm@ 1 atm pressure |
| Sample gases: | Cleanroom air, CDA or N2 |
Dimensions | Height x Width x Depth |
| T-I Max X3 analyzer | 22,17 x 48,26 x 66,55 cm (8.73 x 19 x 26.2 in) |
Weight | |
| T-I Max X3 analyzer | 28 Kg |
Electrical Specifications | |
| Electrical | 220VAC, 50/60 Hz |
| Total Power Consumption | 1255 Watts |
| Running Power Consumption | 904 Watts |
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User interfaces | 10.4” LCD Touchscreen 10/100 Base-T Ethernet USB, RS-232, RS-485 Modbus TCP (optional) |
| Platform | Max X Series analyzer |
| Data Storage | Internal or external flash drive |
| Certifications | CE |